Abstract

The present disclosure relates to semiconductor structures and, more particularly, to grating couplers with multiple configurations and methods of manufacture. A structure includes: a grating coupler having a sawtooth configuration provided over a semiconductor slab; and a back end of line

Date

March 26, 2019

Authors

AP Jacob, Y Bian

Inventors

Ajey Poovannummoottil Jacob, Yusheng Bian

Patent_office

US

Patent_number

10241269

Application_number

15974252