Abstract

Disclosed are non-planar monolithic hybrid optoelectronic structures. These structures are referred to as non-planar because they contain one or more semiconductor fins. These structures are referred to as monolithic because they contain, within each semiconductor fin, an optical waveguide core positioned laterally between a light sensor and a photode tector. Specifically, each semiconductor fin has end portions and a center portion positioned laterally between the end portions. The center portion is an optical waveguide core and the end portions have trenches that contain the light source and photodetector, respectively. These structures are referred to as hybrid because the optical waveguide core is made of one semiconductor material and the light sensor and (Continued)

Date

January 9, 2018

Authors

AP Jacob

Inventors

Ajey P Jacob

Patent_office

US

Patent_number

9864136

Application_number

15231840