Publications
Folded ballistic conductor interconnect line
Abstract
A method includes forming a folding template in a first dielectric layer. The folding template has a plurality of surfaces that are positioned in different planes. A ballistic conductor line is formed on the plurality of surfaces of the folding template. A device includes a first dielectric layer and a vertically folded line disposed in the first dielectric layer, the vertically folded line including a ballistic conductor material.
- Date
- April 25, 2017
- Authors
- AP Jacob
- Inventors
- Ajey Poovannummoottil Jacob
- Patent_office
- US
- Patent_number
- 9633947
- Application_number
- 14608337