Abstract

(54) METHODS OF REMOVING FINS FOR(52) US Cl. FINFET SEMCONDUCTORDEVICES CPC........ HOIL 21/3085 (2013.01); HOIL 21/3081

Date

April 19, 2016

Authors

R Xie, A Knorr, AP Jacob, M Hargrove

Inventors

Ruilong Xie, Andreas Knorr, Ajey Poovannummoottil Jacob, Michael Hargrove

Patent_office

US

Patent_number

9318342

Application_number

14811987